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High Resolution Spectrum of Xenon Ions at 13.4 nm



S S. Churilov, Y N. Joshi, Joseph Reader


The spectrum of xenon excited in a low-inductance vacuum spark was photographed at high resolution in the region 9.5 nm - 15.5 nm. The observed transitions were identified as belonging to ions from Xe8+ to Xe13+. In the region of importance for EUV lithography around 13.4 nm, the strongest lines were identified as 4d8 -4d7 5p transitions in Xe10+. The identifications were made by using electronic energy parameters extrapolated along the isoelectronic sequence.
Optics Letters
No. 16


extreme ultraviolet, ions, microlithography, spectrum, wavelengths, xenon


Churilov, S. , Joshi, Y. and Reader, J. (2003), High Resolution Spectrum of Xenon Ions at 13.4 nm, Optics Letters (Accessed April 17, 2024)
Created July 31, 2003, Updated October 12, 2021