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High Resolution Spectrum of Xenon Ions at 13.4 nm

Published

Author(s)

S S. Churilov, Y N. Joshi, Joseph Reader

Abstract

The spectrum of xenon excited in a low-inductance vacuum spark was photographed at high resolution in the region 9.5 nm - 15.5 nm. The observed transitions were identified as belonging to ions from Xe8+ to Xe13+. In the region of importance for EUV lithography around 13.4 nm, the strongest lines were identified as 4d8 -4d7 5p transitions in Xe10+. The identifications were made by using electronic energy parameters extrapolated along the isoelectronic sequence.
Citation
Optics Letters
Volume
28
Issue
No. 16

Keywords

extreme ultraviolet, ions, microlithography, spectrum, wavelengths, xenon

Citation

Churilov, S. , Joshi, Y. and Reader, J. (2003), High Resolution Spectrum of Xenon Ions at 13.4 nm, Optics Letters (Accessed April 17, 2024)
Created July 31, 2003, Updated October 12, 2021