February 5, 2018
Author(s)
Gerard E. Henein, Juraj Topolancik, Kerry NMN Siebein
… SiO2, Al2O3 and ITO have been deposited via ion beam sputtering at room temperature. The SiO2 films, 100 … Ion beam sputtering, resistivity, breakdown, SiO2, Al2O3, ITO … High Quality Oxide Films Deposited at Room Temperature by Ion Beam Sputtering …