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Conferences

The evaluation of a comprehensive MS reference library

Author(s)
Vladimir G. Zaikin, C L. Clifton, S G. Lias, Anzor I. Mikaia, Stephen Stein, O D. Sparkman
Step-by-step procedures of spectra evaluation in the NIST/NIH/EPA mass spectral library is presented. The criteria for data inclusion to the library are

Microwave Characterization of Flip-Chip MMIC Components

Author(s)
Roger Marks, Jeffrey A. Jargon, C. K. Pao, C. P. Wen, Y. C. Shih
Abstract: We apply custom calibration standards and software to the accurate on-wafer measurement of MIM capacitors and spiral inductors on flip-chip coplanar

Overlay Measurements and Standards

Author(s)
Richard M. Silver, James E. Potzick, Robert D. Larrabee
The relative misalignment of features produced by different mask levels (i.e., overlay error) is projected to become an increasingly important problem to the

Display-Measurement Round-Robin

Author(s)
D. J. Bechis, M. D. Grote, D. P. Bortfeld, L. H. Hammer, M. J. Polak, Edward F. Kelley, George R. Jones Jr., Paul A. Boynton
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