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A new NIST SEM magnification calibration standard has been fabricated and characterized in production prototype form. The SRM 2090A samples contain structures
Vladimir G. Zaikin, C L. Clifton, S G. Lias, Anzor I. Mikaia, Stephen Stein, O D. Sparkman
Step-by-step procedures of spectra evaluation in the NIST/NIH/EPA mass spectral library is presented. The criteria for data inclusion to the library are
A thermodynamic model based on the extended corresponding states principle has been developed to calculate the solubilities of nitrogen in five selected agents
Roger Marks, Jeffrey A. Jargon, C. K. Pao, C. P. Wen, Y. C. Shih
Abstract: We apply custom calibration standards and software to the accurate on-wafer measurement of MIM capacitors and spiral inductors on flip-chip coplanar
Every artifact measurement standard has some uncertainty associated with its calibration, and the NIST Photomask Linewidth Standards are no exception. This
J Schneir, T Mcwaid, Ronald G. Dixson, V W. Tsai, John S. Villarrubia, Edwin R. Williams, E Fu
NIST personnel visited 23 IC manufacturing companies and equipment suppliers during 1994 to determine semiconductor industry needs for scanned probe metrology
Richard M. Silver, James E. Potzick, Robert D. Larrabee
The relative misalignment of features produced by different mask levels (i.e., overlay error) is projected to become an increasingly important problem to the
This paper presents a bottom up introduction to process modeling requirements for product realization which should drive new methods and computer tools. Though
A novel design for an ultraviolet critical dimension measurement transmission microscope utilizing the Stewart platform as the rigid main structure has been
Walter J. Rossiter Jr, Walter E. Byrd, Willard E. Roberts, Dawn M. Bailey
The U.S. Army Construction Engineering Research (CERL) has been investigating the development of a test methodology for evaluating the service life of roofing
William M. Pitts, Nelson P. Bryner, Erik L. Johnsson
The findings of an extensive series of over 140 natural gas fires in a 2/5ths-scale model of a standard room have been previously reported. The current work
Y. R. Sivathanu, Anthony Hamins, Robert Hagwood, Takashi Kashiwagi
Deconvolution of local properties from line-of-sight measurements is important in a wide variety of applications such as x-ray tomography, nuclear magnetic
Research is being conducted to describe the characteristics of an improved fire detector which promptly reacts to smoke while discriminating between smoke and
In most engineering design processes, there are three major phases of design: functional, conceptual, and detailed design (Gui94). However, most current