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Conferences

Scanning Electron Microscope Metrology

Author(s)
Michael T. Postek
During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high

Hertzian Contact Resonances

Author(s)
John A. Kramar, T Mcwaid, J Schneir, E C. Teague
The resonant frequency of a sphere in contact with a flat surface was measured as a function of loading force for contacting materials with different elastic

Systematic Errors in NIST-7

Author(s)
Robert E. Drullinger, W D. Lee, John P. Lowe, F L. Walls, D J. Glaze, Jon H. Shirley

Microform Calibrations in Surface Metrology

Author(s)
Jun-Feng Song, F Rudder, Theodore V. Vorburger, A Hartman, Brian R. Scace, J Smith
Microform calibrations include the measurement of complex profile forms and position errors of micrometer scale in combination with the measurement of

Force Calibrations in the Nanonewton Regime

Author(s)
Lowell P. Howard, E C. Teague
An instrument is described which is shown capable of making preliminary measurements of nanonewton forces. A technique is described which allows absolute