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Microwave Characterization of Flip-Chip MMIC Components

Published

Author(s)

Roger Marks, Jeffrey A. Jargon, C. K. Pao, C. P. Wen, Y. C. Shih

Abstract

Abstract: We apply custom calibration standards and software to the accurate on-wafer measurement of MIM capacitors and spiral inductors on flip-chip coplanar-waveguide MMICs. We suggest equiva1lent cir­cuit models and document their deficiencies. The results are applicable to the development of an accurate CAD database.
Proceedings Title
Proc., 1995 Electronic Components and Tech. Conf.
Conference Dates
May 21-24, 1995
Conference Location
Las Vegas, NV

Citation

Marks, R. , Jargon, J. , Pao, C. , Wen, C. and Shih, Y. (1995), Microwave Characterization of Flip-Chip MMIC Components, Proc., 1995 Electronic Components and Tech. Conf., Las Vegas, NV, [online], https://doi.org/10.1109/ECTC.1995.514406 (Accessed July 16, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created May 1, 1995, Updated November 10, 2018