Metrology with the Ultraviolet Scanning Transmission Microscope
Richard M. Silver, James E. Potzick, Y Hu
A novel design for an ultraviolet critical dimension measurement transmission microscope utilizing the Stewart platform as the rigid main structure has been implemented. This new design shows improved vibration characteristics and is able to accommodate large specimens. We present alignment procedures and their relevance to obtain accurate linewidth measurements. Initial measurements with the new system comparing visible and ultraviolet wavelength illumination show expected characteristic dependence of the intensity image as a function of wavelength.
Proceedings of SPIE
February 20, 1995
Santa Clara, CA, USA
Integrated Circuit Metrology, Inspection, and Process Control IX, Marylyn H. Bennett, Editor May 1995, Novel Metrology Methods