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Metrology with the Ultraviolet Scanning Transmission Microscope

Published

Author(s)

Richard M. Silver, James E. Potzick, Y Hu

Abstract

A novel design for an ultraviolet critical dimension measurement transmission microscope utilizing the Stewart platform as the rigid main structure has been implemented. This new design shows improved vibration characteristics and is able to accommodate large specimens. We present alignment procedures and their relevance to obtain accurate linewidth measurements. Initial measurements with the new system comparing visible and ultraviolet wavelength illumination show expected characteristic dependence of the intensity image as a function of wavelength.
Proceedings Title
Proceedings of SPIE
Volume
2439
Conference Dates
February 20, 1995
Conference Location
Santa Clara, CA, USA
Conference Title
Integrated Circuit Metrology, Inspection, and Process Control IX, Marylyn H. Bennett, Editor May 1995, Novel Metrology Methods

Citation

Silver, R. , Potzick, J. and Hu, Y. (1995), Metrology with the Ultraviolet Scanning Transmission Microscope, Proceedings of SPIE, Santa Clara, CA, USA (Accessed April 25, 2024)
Created April 30, 1995, Updated October 12, 2021