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Conferences

Controlling Activities in a Virtual Manufacturing Cell

May 1, 1996

Author(s)

Michael Iuliano, Albert W. Jones

Researchers at the National Institute of Standards and Technology are developing a virtual manufacturing cell. This cell will contain simulation models of a...

Dynamic Objects and Meta-level Programming of an EXPRESS Language Environment

May 1, 1996

Author(s)

Peter O. Denno

This paper describes design and programming techniques employed in the development of a language environment for the EXPRESS information modeling language. A...

SEMCconductors Resistivity Measurements Using Split-Dielectric Resonator Technique

May 1, 1996

Author(s)

Jerzy Krupka, S. Pietruszko, Richard G. Geyer, James R. Baker-Jarvis, Kristof Derzakowski

Interference-Filter Characterization of Spectraradiometers and Colorimeters

May 1, 1996

Author(s)

Paul A. Boynton, Yoshi Ohno, Edward F. Kelley

Specular and Diffuse Reflection Measurements of Electronic Displays

May 1, 1996

Author(s)

George R. Jones Jr., Edward F. Kelley, Thomas Germer

Measurement of a CD and Sidewall Angle Artifact with Two Dimensional CD AFM Metrology

May 1, 1996

Author(s)

Ronald G. Dixson, N. Sullivan, J Schneir, T Mcwaid, V W. Tsai, J Prochazka, M. Young

Despite the widespread acceptance of SEM metrology in semiconductor manufacturing, there is no SEM CD standard currently available. Producing such a standard is...

SEM Performance Evaluation Using the Sharpness Criterion

May 1, 1996

Author(s)

Michael T. Postek, Andras Vladar

Fully automated or semi-automated scanning electron microscopes (SEM) are now commonly used in semiconductor production and other forms of manufacturing. The...

International Comparison of Photomask Linewidth Standards: U.S. (NIST) and U.K. (NPL)

May 1, 1996

Author(s)

James E. Potzick, J Nunn

Photomask linewidth standards serve as primary standards for the calibration of photomask metrology tools and are available from the national standards...

New Algorithm for the Measurement of Pitch in Metrology Instruments

May 1, 1996

Author(s)

Nien F. Zhang, Michael T. Postek, Robert D. Larrabee, L Carroll, William J. Keery

Traditionally, the measurement of pitch in metrology instruments is thought to be a benign self-compensating function. However, as the measurement uncertainty...

Calibration of Scanning Electron Microscope Magnification Standards SRM-484

May 1, 1996

Author(s)

Joseph Fu, Theodore V. Vorburger, D Ballard

Standard Reference Material (SRM) 484 is an artifact for calibrating the magnification scale of a scanning electron microscope. Since 1977 the National...

High-Accuracy Critical-Dimension Metrology Using a Scanning Electron Microscope

May 1, 1996

Author(s)

J R. Lowney, Andras Vladar, Michael T. Postek

Two Monte Carlo computer codes have been written to simulate the transmitted-, backscattered-, and secondary-electron signals from targets in a scanning...

Electrical Test Structures Replicated in Silicon-On-Insulator Material

May 1, 1996

Author(s)

Michael W. Cresswell, J Sniegowski, Rathindra Ghoshtagore, Robert Allen, L Linholm, John S. Villarrubia

Measurements of the linewidths of submicrometer features made by different metrology techniques have frequently been characterized by differences of up to 90 nm...

High Accuracy Overlay Measurements

May 1, 1996

Author(s)

Richard M. Silver, James E. Potzick, Fredric Scire, Robert D. Larrabee

The reduced critical dimensions of semiconductor devices place more stringent requirements on the precision and accuracy of overlay metrology tools used to...

Toward Accurate Linewidth Metrology Using Atomic Force Microscopy and Tip Characterization

May 1, 1996

Author(s)

Ronald G. Dixson, J Schneir, T Mcwaid, N. Sullivan, V W. Tsai, S Zaidi, S Brueck

As the critical dimensions of integrated circuit features decrease toward 0.18 um, feature width measurements with nanometer level accuracy will become...

Fundamentals and Problems of Fiber Current Sensors

May 1, 1996

Author(s)

Gordon W. Day, Kent B. Rochford, Allen Rose

Magneto-Optic Rotation Sensor Using a Laser Diode as Both Source and Detector

May 1, 1996

Author(s)

Kent B. Rochford, Allen Rose

Maintaining multi-level planar maps in intelligent systems

April 26, 1996

Author(s)

John A. Horst

Robotics & Intelligent Systems, Unmanned Systems, Mobility, Control

Developing Detector Siting Rules From Computational Experiments in Spaces With Complex Geometries

April 4, 1996

Author(s)

William D. Davis, Glenn P. Forney, Richard W. Bukowski

The National Institute of Standards and Technology (NIST) is conducting a four-year research project where in a computational fluid dynamics (CFD) computer code...

GPS Aided Retrotraverse For Unmanned Ground Vehicles

April 1, 1996

Author(s)

Karl Murphy, Steven Legowik

A computer controlled HMMWV automatically retraces a previously recorded path using navigation data, a process we have termed retrotraverse. A Kalman filter...

Terminal Emulation for Automation and Testing of Character-Graphic Programs: A Code Walkthrough

April 1, 1996

Author(s)

Don E. Libes

This paper describes a technique that allows automation and testing of charactergraphic programs using existing public-domain tools. Specially, Tcl, Tk and...

Complex Permeability Measurements of Microwave Ferrites

April 1, 1996

Author(s)

Richard G. Geyer, Jerzy Krupka

Phase Measurements of Electromagnetic Fields Using Infrared Imaging Techniques and Microwave Holography

April 1, 1996

Author(s)

J. E. Will, J. Morgard, Carl F. Stubenrauch, Katherine MacReynolds, M. Seifert, R. Sega

Optical Retardance Standard: A Progress Report

April 1, 1996

Author(s)

Kent B. Rochford, Allen Rose, Paul A. Williams, I. G. Clarke, Paul D. Hale, Gordon W. Day

Analysis of High Bay Hangar Facilities for Detector Sensitivity and Placement.

March 26, 1996

Author(s)

Kathy A. Notarianni, William D. Davis, Darren Lowe, J E. Gott, S Laramee

This study was conducted to investigate the response of various fire detectors and automatic sprinklers in high bay aircraft hangars. Laboratory and full-scale...

Inhibition of Flames by Condensed-Phase Agents

March 26, 1996

Author(s)

Gregory T. Linteris, D Reinelt

The ban on the production of the fire suppressant CF3Br has created a need for replacement agents. Obvious alternatives are other halogenated hydrocarbons, and...

Signatures of Smoldering/Pyrolyzing Fires for Multi-Element Detector Evaluation

March 26, 1996

Author(s)

Thomas G. Cleary, William L. Grosshandler, Marc R. Nyden, William J. Rinkinen

Levels of CO, CO2, H2O, hydrocarbons, smoke, temperature and velocity produced in the plumes of smoldering/pyrolyzing wood and smoldering cotton fires are...

Office Work Station Heat Release Rate Study: Full Scale vs. Bench Scale

March 26, 1996

Author(s)

Daniel M. Madrzykowski

The National Institute of Standards and Technology (NIST) has conducted a study with office work stations to examine their heat release rates and to determine...

Tomographic Reconstruction of Probability Density Functions in Turbulent Flames

March 26, 1996

Author(s)

P Vallikul, R Goulard, C Mavriplis, Marc R. Nyden

Local probability density functions (PDF) of absorption coefficients within turbulent flames have been retrieved from their multi-angular absorption data of...

Consideration on Required Number of Exits in a Room. Part 1. Study on the Safety Performance of Exit Provisions.

March 13, 1996

Author(s)

T Tanaka, I Hagiwara, Y Mimura

Consideration on Common Path Length and Single Stairway. Part 2. Study on the Safety Performance of Exit Provisions.

March 13, 1996

Author(s)

I Hagiwara, T Tanaka, Y Mimura

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