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On-Wafer Measurement at Millimeter Wave Frequencies



Dylan F. Williams, J. M. Belquin, G. Dambrine, R. Fenton


We investigate millimeter wave on-wafer calibration and measurement in coplanar waveguide and demonstrate the applicability of the multiline thru-reflect-line calibration and good measurement repeatability between laboratories. We also investigate calibrations in conductor-backed coplanar waveguide.
Proceedings Title
Tech. Dig., IEEE MTT-S International Microwave Symposium
Conference Dates
June 17-21, 1996
Conference Location
San Francisco, CA


Williams, D. , Belquin, J. , Dambrine, G. and Fenton, R. (1996), On-Wafer Measurement at Millimeter Wave Frequencies, Tech. Dig., IEEE MTT-S International Microwave Symposium, San Francisco, CA, [online], (Accessed May 25, 2024)


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Created June 1, 1996, Updated November 10, 2018