Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

NIST Interagency/Internal Report (NISTIR)

Shape-Sensitive Linewidth Measurements of Resist Structures

Author(s)
John S. Villarrubia, Andras Vladar, Michael T. Postek
Widths of developed 193 nm resist lines were measured by two methods and compared. One method was a new model-based library method. In this method the scanning...

TIN Techniques for Data Analysis and Surface Construction

Author(s)
Christoph J. Witzgall, Javier Bernal, Geraldine Cheok
This report addresses the task of meshing point clouds by triangulated elevated surfaces referred to as TIN surfaces. It describes the general features of this...

1st Annual PKI Research Workshop Proceedings

Author(s)
Sean W. Smith, William Polk, Nelson Hastings
NIST hosted the first annual Public Key Infrastructure (PKI) Research Workshop on April 24-25, 2002. The two-day event brought together PKI experts from...

A Simulation Analysis of BACnet Local Area Networks

Author(s)
W Song, S Hong, Steven T. Bushby
Cnet is a standard data communication protocol for building automation and control systems. BACnet defines an object-base model of the information that is...
Was this page helpful?