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NIST Interagency/Internal Report (NISTIR)

Shape-Sensitive Linewidth Measurements of Resist Structures

Author(s)
John S. Villarrubia, Andras Vladar, Michael T. Postek
Widths of developed 193 nm resist lines were measured by two methods and compared. One method was a new model-based library method. In this method the scanning

Time and Frequency Bulletin

Author(s)
Eyvon Petty
The Time and Frequency Bulletin provides information on performance of time scales and a variety of broadcasts (and related information) to users of the NIST

TIN Techniques for Data Analysis and Surface Construction

Author(s)
Christoph J. Witzgall, Javier Bernal, Geraldine Cheok
This report addresses the task of meshing point clouds by triangulated elevated surfaces referred to as TIN surfaces. It describes the general features of this

1st Annual PKI Research Workshop Proceedings

Author(s)
Sean W. Smith, William Polk, Nelson Hastings
NIST hosted the first annual Public Key Infrastructure (PKI) Research Workshop on April 24-25, 2002. The two-day event brought together PKI experts from
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