Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Semiconductor Microelectronics and Nanoelectronics Programs



Stephen Knight, Joaquin (. Martinez, Michele L. Buckley


The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid imporvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology. NIST is fulfilling its mission of strengthening the U.S. economy, works with industry to develop and apply technology, measurements, and standards; and applies substantial efforts on behalf of the semiconductor industry and its infrastructure. This report describes the many projects being conducted at NIST that constitute that effort.
NIST Interagency/Internal Report (NISTIR) - 7010
Report Number


modeling, semiconductor, thin film, wafer characterization, interconnect and packaging, lithography, microelectronics


Knight, S. , Martinez, J. and Buckley, M. (2003), Semiconductor Microelectronics and Nanoelectronics Programs, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online],, (Accessed July 17, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created June 30, 2003, Updated October 12, 2021