TY - GEN AU - Stephen Knight AU - Joaquin Martinez AU - Michele Buckley C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 2003-07-01 00:07:00 DO - https://doi.org/10.6028/NIST.IR.7010 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 2003 TI - Semiconductor Microelectronics and Nanoelectronics Programs UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31401 ER -