This is a high-level, full-color brochure detailing the activities and challenges of the Semiconductor Electronics Division. Topics include Division history, nanotechnology, MEMS, electrical test structures, power electronics, optical and electrical measurements, gate dielectrics, and super transistors.
mems, nanotechnology, semiconductor, test structures, transistors
and Secula, E.
Semiconductor Electronics Division, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed June 4, 2023)