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Semiconductor Electronics Division



David G. Seiler, Erik M. Secula


This is a high-level, full-color brochure detailing the activities and challenges of the Semiconductor Electronics Division. Topics include Division history, nanotechnology, MEMS, electrical test structures, power electronics, optical and electrical measurements, gate dielectrics, and super transistors.
NIST Interagency/Internal Report (NISTIR) -


mems, nanotechnology, semiconductor, test structures, transistors


Seiler, D. and Secula, E. (2003), Semiconductor Electronics Division, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 24, 2024)
Created September 29, 2003, Updated October 12, 2021