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Search Publications by: Ulf Griesmann (Fed)

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Displaying 51 - 70 of 70

Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST

July 31, 2005
Author(s)
Ulf Griesmann, Nadia Machkour-Deshayes, Byoung C. Kim, Quandou (. Wang, Lahsen Assoufid
The Geometry Measuring Machine (GEMM) of the National Institute of Standards and Technology (NIST) is a profilometer for free-form surfaces. A profile is reconstructed from local curvature of a test part surface, measured at several locations along a line

Interferometric Thickness Calibration of 300mm Silicon Wafers

July 20, 2005
Author(s)
Quandou (. Wang, Ulf Griesmann, Robert S. Polvani
The Improved Infrared Interferometer (IR3) at the National Institute of Standards and Technology (NIST) is a phase-measuring interferometer, operating at a wavelength of 1550 nm, which is being developed for measuring the thickness and thickness variation

Optical Flatness Metrology for 300 mm Silicon Wafers

April 1, 2005
Author(s)
Ulf Griesmann, Quandou (. Wang, T D. Raymond
At the National Institute of Standards and Technology (NIST), we are developing two interferometric methods for measuring the thickness variation and flatness of free-standing and chucked silicon wafers with diameters up to 300mm. The eXtremely accurate

A Simple Ball Averager for Reference Sphere Calibrations

January 1, 2005
Author(s)
Ulf Griesmann, Quandou (. Wang, Johannes A. Soons, Remi Carakos
When measuring the form errors of precision optics with an interferometer, the calibration of the reference wavefront is of central importance. Ball averaging, or random ball testing, has in recent years emerged as a robust method for calibrating spherical

Modal Reconstruction of Aspheric Surfaces from Experimental Second Derivatives

January 1, 2005
Author(s)
Nadia Machkour-Deshayes, Ulf Griesmann, Byoung C. Kim
A method for the measurement of precise aspheric optical surfaces based on measurements of the second derivatives of the surface is evaluated. A compact phase-measuring interferometer is used to determine the second derivatives of a surface on a survey

Characterization of Precision Spheres With XCALIBIR

January 1, 2004
Author(s)
Ulf Griesmann, Johannes A. Soons, Quandou (. Wang
The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius-of-curvature at one point and the deviation from the perfect spherical form at all other points of the sphere. Measurements of radius

Measuring Form and Radius of Spheres With Interferometry

January 1, 2004
Author(s)
Quandou (. Wang, Johannes A. Soons, Ulf Griesmann
The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius of curvature at one point and deviation from the perfect spherical form at all other points of the sphere. Measurements of radius and

Atomic Oscillator Strengths by Emission Spectroscopy and Lifetime Measurements

May 1, 2002
Author(s)
Wolfgang L. Wiese, Ulf Griesmann, R Kling, J Musielok
A series of atomic oscillator strengths measurements was carried out in the last seven years at NIST with a combination of emission spectroscopy and lifetime measurements. Several light elements, specifically C, N, O, F and Ne, and two medium-heavy

New Optical Metrology at NIST for Semiconductor Lithography

April 17, 2002
Author(s)
Ulf Griesmann, Tony L. Schmitz, Johannes A. Soons
Optical semiconductor lithography in the deep ultraviolet (DUV) and next generation lithographies such as extreme ultraviolet lithography (EUVL) create many new challenges for surface figure metrology. We discuss the needs for flatness metrology of silicon

Absolute Transition Rates for Transitions From 5p Levels in Kr II

March 1, 2001
Author(s)
Krzysztof Dzierzega, Ulf Griesmann, Gillian Nave, L Bratasz
Branching ratios were measured for 155 electric dipole transitions from 5p and 5p1 levels of singly ionized Kr between 200 nm and 2400 nm. Of these, 83 were measured for the first time. Absolute transition rates for prominent lines, with uncertainties as

Accurate Transition Rates for the 5p-5s Transitions in Kr I

August 1, 2000
Author(s)
Krzysztof Dzierzega, U Volz, Gillian Nave, Ulf Griesmann
Branching fractions were measured for electric dipole transitions for the 5p upper levels to the 5s levels in neutral Krypton atoms. The measurements were made with a wall-stabilized electric arc for the spectral lines in the visible, and with a hollow

Refractivity of Nitrogen Gas in the Vacuum Ultraviolet

December 1, 1999
Author(s)
Ulf Griesmann, John H. Burnett
We have measured the refractivity of nitrogen gas in the ultraviolet and vacuum ultraviolet using a Fourier transform spectrometer. A new two-term Sellmeier formula for the standard refractivity between 145 nm and 270 nm is derived.
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