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Interferometric Thickness Calibration of 300mm Silicon Wafers

Published

Author(s)

Quandou (. Wang, Ulf Griesmann, Robert S. Polvani

Abstract

The Improved Infrared Interferometer (IR3) at the National Institute of Standards and Technology (NIST) is a phase-measuring interferometer, operating at a wavelength of 1550 nm, which is being developed for measuring the thickness and thickness variation of low-doped silicon wafers with diameters up to 300mm. The purpose of the interferometer is to produce calibrated silicon wafers, with a certified measurements uncertainty, which can be used as reference wafers by wafer manufacturers and metrology tool manufacturers. We give an overview of the design of the interferometer and discuss its application to wafer thickness measurements. The conversion of optical thickness, as measured by the interferometer, to the wafer thickness requires knowledge of the refractive index of the material of the wafer. We describe a method for measuring the refractive index which is then used to establish absolute thickness and thickness variation maps for the wafer.
Conference Dates
July 20-22, 2005
Conference Location
Middletown, CT, USA
Conference Title
ASPE (American Society for Precision Engineering) 2005 Summer Topical Meeting - Precision Interferometric Metrology

Keywords

300 mm silicon wafers, Infrared interferometer, Interferometry, wafer thickness, wafer thickness variation (TTV)

Citation

Wang, Q. , Griesmann, U. and Polvani, R. (2005), Interferometric Thickness Calibration of 300mm Silicon Wafers, ASPE (American Society for Precision Engineering) 2005 Summer Topical Meeting - Precision Interferometric Metrology, Middletown, CT, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822291 (Accessed February 27, 2024)
Created July 19, 2005, Updated October 12, 2021