@conference{775146,
  author = {Quandou Wang and Ulf Griesmann and Robert Polvani},
  title = {Interferometric Thickness Calibration of 300mm Silicon Wafers},
  year = {2005},
  month = {2005-07-20 00:07:00},
  publisher = {ASPE (American Society for Precision Engineering) 2005 Summer Topical Meeting - Precision Interferometric Metrology, Middletown, CT, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822291},
  language = {en},
}