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Search Publications by: Ulf Griesmann ()

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Displaying 26 - 50 of 61

Power Spectral Density: Is it right?

June 13, 2010
Author(s)
Ulf Griesmann, John Lehan, Jiyoung Chu
We concentrate on the instrumental issues surrounding power spectral density (PSD) determination, using as an example, the most common optical shop QA tool, the Fizeau interferometer. We briefly discuss the properties of an ideal calibration method for PSD

Computer-Generated Hologram Cavity Interferometry Test for Large X-Ray Mandrels: Design

June 1, 2009
Author(s)
Guangjun Gao, John P. Lehan, William W. Zhang, Ulf Griesmann, Johannes A. Soons
A glancing incidence interferometric test for large x-ray mirror mandrels, using two computer generated holograms (CGH s), is described. The two CGH s are used to form a double pass glancing incidence system. One layout of the CGH-cavity glancing incidence

Index of Retraction and its Temperature Dependence of Calcium Fluoride Near 157nm

October 16, 2008
Author(s)
John H. Burnett, Ulf Griesmann, R Gupta, T E. Jou
We have made accurate measurements near 157 nm of the relative index of refraction, its dispersion, and its temperature dependence for two grades of calcium fluoride in N 2 gas. Accurate measurements of the quantitites are needed for the design of lens

Measuring the Phase Transfer Function of a Phase-Shifting Interferometer

August 13, 2008
Author(s)
JiYoung Chu, Quandou (. Wang, John P. Lehan, Ulf Griesmann, Guangjun Gao
In characterizing the performance of a phase-shifting interferometer, the dependence of the measured height on the spatial frequency is rarely considered. We describe a test mirror with a special height relief that can be used to measure the height

Stationary and non-stationary deformations in three-flat tests

July 7, 2008
Author(s)
Ulf Griesmann, Quandou (. Wang, Nicolas Laurenchet, Johannes A. Soons
Calibration procedures for optical reference flats of phase-shifting interferometers (three-flat tests) are critically important if flatness measurements with low uncertainty are desired. In these tests, all combinations of three flats with unknown

Dual-CGH Interferometry Test for X-Ray Mirror Mandrels

June 15, 2008
Author(s)
Guangjun Gao, John Lehan, Ulf Griesmann
We describe a glancing-incidence interferometric double-pass test, based on a pair of computer generated holograms (CGHs), for mandrels used to fabricate x-ray mirrors for space-based x-ray telescopes. The design of the test and its realization are

Three-Flat Test Solutions Including Mounting-Induced Deformations

September 1, 2007
Author(s)
Ulf Griesmann, Quandou (. Wang, Johannes A. Soons
We investigate three-flat calibration methods for circular flats, based on rotation symmetry and mirror symmetry, for absolute interferometric flatness measurements in the presence of deformations caused by the support mechanism for the flats, which are a

Manufacture and Metrology of 300 mm Silicon Wafers with Ultra-Low Thickness Variations

January 2, 2007
Author(s)
Ulf Griesmann, Quandou (. Wang, Marc Tricard, Paul Dumas, Christopher Hill
With the evolution of exposure tools for optical lithography towards larger numerical apertures, the semiconductor industry expects continued demand for improved wafer flatness at the exposure site. The Allowable site flatness for 300 mm wafers is expected

Three-Flat Test Solutions based on Simple Mirror Symmetry

August 1, 2006
Author(s)
Ulf Griesmann
Three-flat tests are the archetypes of measurement procedures used in interferometric surface and wavefront metrology to separate errors in the interferometer reference wavefront from errors due to the tests part surface, so-called absolute tests. A new

Form-Profiling of Optics Using the Geometry Measuring Machine and NIST M-48 CMM

January 1, 2006
Author(s)
Nadia Machkour-Deshayes, John R. Stoup, John Lu, Johannes A. Soons, Ulf Griesmann, Robert S. Polvani
We are developing an instrument, the Geometry Measuring Machine (GEMM), to measure the profile errors of aspheric and free form optical surfaces, which require measurement uncertainties near 1nm. Using GEMM, an optical profile is reconstructed from a set

Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST

July 31, 2005
Author(s)
Ulf Griesmann, Nadia Machkour-Deshayes, Byoung C. Kim, Quandou (. Wang, Lahsen Assoufid
The Geometry Measuring Machine (GEMM) of the National Institute of Standards and Technology (NIST) is a profilometer for free-form surfaces. A profile is reconstructed from local curvature of a test part surface, measured at several locations along a line

Interferometric Thickness Calibration of 300mm Silicon Wafers

July 20, 2005
Author(s)
Quandou (. Wang, Ulf Griesmann, Robert S. Polvani
The Improved Infrared Interferometer (IR3) at the National Institute of Standards and Technology (NIST) is a phase-measuring interferometer, operating at a wavelength of 1550 nm, which is being developed for measuring the thickness and thickness variation

Optical Flatness Metrology for 300 mm Silicon Wafers

April 1, 2005
Author(s)
Ulf Griesmann, Quandou (. Wang, T D. Raymond
At the National Institute of Standards and Technology (NIST), we are developing two interferometric methods for measuring the thickness variation and flatness of free-standing and chucked silicon wafers with diameters up to 300mm. The eXtremely accurate

A Simple Ball Averager for Reference Sphere Calibrations

January 1, 2005
Author(s)
Ulf Griesmann, Quandou (. Wang, Johannes A. Soons, Remi Carakos
When measuring the form errors of precision optics with an interferometer, the calibration of the reference wavefront is of central importance. Ball averaging, or random ball testing, has in recent years emerged as a robust method for calibrating spherical

Modal Reconstruction of Aspheric Surfaces from Experimental Second Derivatives

January 1, 2005
Author(s)
Nadia Machkour-Deshayes, Ulf Griesmann, Byoung C. Kim
A method for the measurement of precise aspheric optical surfaces based on measurements of the second derivatives of the surface is evaluated. A compact phase-measuring interferometer is used to determine the second derivatives of a surface on a survey

Characterization of Precision Spheres With XCALIBIR

January 1, 2004
Author(s)
Ulf Griesmann, Johannes A. Soons, Quandou (. Wang
The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius-of-curvature at one point and the deviation from the perfect spherical form at all other points of the sphere. Measurements of radius

Measuring Form and Radius of Spheres With Interferometry

January 1, 2004
Author(s)
Quandou (. Wang, Johannes A. Soons, Ulf Griesmann
The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius of curvature at one point and deviation from the perfect spherical form at all other points of the sphere. Measurements of radius and