Form-Profiling of Optics Using the Geometry Measuring Machine and NIST M-48 CMM

Published

January 1, 2006

Author(s)

Nadia Machkour-Deshayes, John R. Stoup, John Lu, Johannes A. Soons, Ulf Griesmann, Robert S. Polvani

Abstract

We are developing an instrument, the Geometry Measuring Machine (GEMM), to measure the profile errors of aspheric and free form optical surfaces, which require measurement uncertainties near 1nm. Using GEMM, an optical profile is reconstructed from a set of measured curvature values. We will describe a prototype version of GEMM, its calibration practice, and the measurement site registry practice needed to make nanometer resolution comparisons with other instruments. As a demonstration of GEMM, profiles of an elliptical mirror were measured with GEMM and the NIST Moore M-48 Coordinate Measuring Machine. Using a version of Student''s t Test the profiles were compared and found indistinguishable at the 99% confidence level; and to have a 22 nm peak-to-valley or 6rms deviation. Finally the repeatability of GEMM was evaluated and found to be

Citation

Journal of Research National Institute of Standards and Technology

Volume

111 (5)

Pub Type

Journals

Keywords

precision optics, precision surface, profilometry

Citation

Machkour-Deshayes, N. , Stoup, J. , Lu, J. , Soons, J. , Griesmann, U. and Polvani, R. (2006), Form-Profiling of Optics Using the Geometry Measuring Machine and NIST M-48 CMM, Journal of Research National Institute of Standards and Technology (Accessed December 7, 2024)