Wang, Q.
and Griesmann, U.
(2006),
Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine, Technical Digest of the 2006 Optical Society of America Optical Fabrication and Testing Meeting, Rochester, NY
(Accessed December 15, 2024)
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Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine
Published
Author(s)
,
Abstract
We describe the design of a miniature Fizeau interferometer, which is intended to be an accurate curvature sensor for the NIST Geometry Measuring (GEMM), which is used to measure aspheric and free form surfaces. The interferometer was designed for simultaneous measurements of figure and the distance between the sensor and part under test.Conference Dates
October 9-11, 2006
Conference Location
Rochester, NY
Conference Title
Technical Digest of the 2006 Optical Society of America Optical Fabrication and Testing Meeting
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2006, Updated February 19, 2017