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Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine

Published

Author(s)

Quandou (. Wang, Ulf Griesmann

Abstract

We describe the design of a miniature Fizeau interferometer, which is intended to be an accurate curvature sensor for the NIST Geometry Measuring (GEMM), which is used to measure aspheric and free form surfaces. The interferometer was designed for simultaneous measurements of figure and the distance between the sensor and part under test.
Conference Dates
October 9-11, 2006
Conference Location
Rochester, NY
Conference Title
Technical Digest of the 2006 Optical Society of America Optical Fabrication and Testing Meeting

Citation

Wang, Q. and Griesmann, U. (2006), Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine, Technical Digest of the 2006 Optical Society of America Optical Fabrication and Testing Meeting, Rochester, NY (Accessed March 1, 2024)
Created January 1, 2006, Updated February 19, 2017