Measurements of Refraction in the Deep and Vacuum Ultraviolet Uusing the Minimum Deviation Method
John H. Burnett, R Gupta, Ulf Griesmann
We discuss a procedure to make accurate measurements of the index of refraction, its dispersion, and its temperature dependence, in the deep ultraviolet (near 193 nm), using precision goniometric spectrometers and the minimum deviation method. Measurements of the indices of fused silica and calcium fluoride near 193 nm, with a fractional accuracy of 7 ppm, are discussed. These measurements revealed differences in the indices between different grades of fused silica. Accurate values of the temperature dependencies were determined from measurements of the indices at several temperatures in a 20 degrees C range about 20 degrees C. A procedure to measure the index of calcium fluoride in the vacuum ultraviolet region (157 nm) using a N2 purge housing is discussed.
calcium fluoride, dispersion, fused silica, index of refraction, refractive index
, Gupta, R.
and Griesmann, U.
Measurements of Refraction in the Deep and Vacuum Ultraviolet Uusing the Minimum Deviation Method, SPIE series
(Accessed February 20, 2024)