NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Search Publications by: Theodore V. Vorburger (Assoc)

Search Title, Abstract, Conference, Citation, Keyword or Author
Displaying 126 - 150 of 209

Development of NIST Standard Bullets and Casings Status Report

November 1, 2000
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Alim A. Fatah
In April 1998, two prototype standard bullets were developed at the National Institute of Standards and Technology (NIST). In October 1999, prototype standard casings were also developed at NIST. The standard bullets and casings are intended for use in

Dimensional Metrology of Millimeter- and Sub-millimeter-scale Components

October 1, 2000
Author(s)
Theodore V. Vorburger, Jun-Feng Song, Joseph Fu, M Tundermann, Thomas Brian Renegar, Theodore D. Doiron, N G. Orji
Decreasing sizes and tolerances of engineering components bring a demand for decreasing uncertainty in the dimensional measurements of these parts. Hence there is increasing need for measuring machines capable of performing dimensional and geometrical

Proposed Bullet Signature Comparisons Using Autocorrelation Functions

July 1, 2000
Author(s)
Jun-Feng Song, Theodore V. Vorburger
The National Institute of Standards and Technology (NIST) standard bullets and casings are intended as reference standards for crime laboratories to help verify that the computerized optical-imaging equipment in those laboratories is operating properly

Accurate Dimensional Metrology With Atomic Force Microscopy

June 1, 2000
Author(s)
Ronald G. Dixson, R Koning, Joseph Fu, Theodore V. Vorburger, Thomas B. Renegar
Atomic force microscopes (AFMs) generate three dimensional images with nanometer level resolution and, consequently, are used in the semiconductor industry as tools for sub-micrometer dimensional metrology. Measurements commonly performed with AFMs are

An Overview of Nano-Micro-Meso Scale Manufacturing at the NIST

March 13, 2000
Author(s)
E Amatucci, Nicholas Dagalakis, Bradley N. Damazo, Matthew A. Davies, John Evans, Jun-Feng Song, E C. Teague, Theodore V. Vorburger
The future of nano-, micro- and meso-scale manufacturing operations will be strongly influenced by a new breed of assembly and manufacturing tools that will be intelligent, flexible, more precise, include in-process production technologies and make use of

A Fast Algorithm for Determining the Gaussian Filter Mean Line in Surface Metrology

January 1, 2000
Author(s)
Y B. Yuan, X F. Qiang, Jun-Feng Song, Theodore V. Vorburger
A fast algorithm for assessing the Gaussian filtered mean line was deduced using the central limit theorem and an approximation method. This algorithm only uses simple computer operations such as addition, subtraction and digit shifting, and avoids

A Simplified Realization for the Gaussian Filter in Surface Metrology

January 1, 2000
Author(s)
Y B. Yuan, Theodore V. Vorburger, Jun-Feng Song, Thomas B. Renegar
A simplified realization for the Gaussian filter in surface metrology is presented in this paper. The sampling function sinu/u is used for simplifying the Gaussian function. According to the central limit theorem, when n approaches infinity, the function

Angular Distribution of Light Scattered From a Sinusoidal Grating

January 1, 2000
Author(s)
Egon Marx, Thomas A. Germer, Theodore V. Vorburger, B C. Park
The angular distributions of light scattered by gold-coated and aluminum-coated gratings having amplitudes of ~90 nm and periods of 6.67 ¿m were measured and calculated for light incident from a HeNe laser at an angle of 6E. Experimental results are

NIST Random Profile Roughness Specimens and Standard Bullets

January 1, 2000
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Robert A. Clary, Michael L. McGlauflin, Eric P. Whitenton, Christopher J. Evans
Based on the numerical controlled (NC) diamond turning process used previously for manufacturing random profile roughness specimens, two prototype standard bullets were developed at the National Institute of Standards and Technology (NIST). These standard

NIST Random Profile Roughness Specimens and Standard Bullets

January 1, 2000
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Christopher J. Evans, Michael L. McGlauflin, Eric P. Whitenton, Robert A. Clary
Based on the numerical controlled (NC) diamond turning process used previously for manufacturing random profile roughness specimens, two prototype standard bullets were developed at the National Institute of Standards and Technology (NIST). These standard

Step Height Metrology for Data Storage Applications

November 1, 1999
Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, Thomas Brian Renegar, Theodore V. Vorburger, V W. Tsai, Michael T. Postek
The measurements of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) are quite different from the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger transition

Step-height Metrology for Data Storage Applications

November 1, 1999
Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, Thomas Brian Renegar, Theodore V. Vorburger, V W. Tsai, Michael T. Postek
The measurement of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) is quite different from the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger transition

Effects of Defocus and Algorithm on Optical Step Height Calibration

July 1, 1999
Author(s)
Theodore D. Doiron, Theodore V. Vorburger, P Sullivan
Defocus effects on step height measurements by interferometric microscopy are estimated using different algorithms to calculate the step height. The interferometric microscope is a Mirau-type with a 20x objective and a numerical aperture (NA) of 0.4. Even

Dimensional Metrology with the NIST Calibrated Atomic Force Microscope

June 1, 1999
Author(s)
Ronald G. Dixson, R Koning, V W. Tsai, Joseph Fu, Theodore V. Vorburger
Atomic force microscopes (AFMs) are increasingly used in the semiconductor industry as tools for submicrometer dimensional metrology. The scales of an AFM must be calibrated in order to perform accurate measurements. We have designed and developed the

High Accuracy High Speed Gaussian Filter in Surface Metrology

May 31, 1999
Author(s)
Y B. Yuan, Jun-Feng Song, Theodore V. Vorburger
Both (1+x^2)^(-n) and (sin x/x)^n functions are very close to the Gaussian distribution for large value of n. Based on these functions, two new algorithms are developed for designing high accuracy and high speed recursive type Gaussian digital filters. The

Measurements and Predictions of Light Scattering by Coatings

May 1, 1999
Author(s)
Theodore V. Vorburger, Egon Marx, M E. McKnight, Maria Nadal, P Y. Barnes, Alan Keith Thompson, Michael Galler, Fern Y. Hunt, Mark R. VanLandingham
We show comparisons between calculations and measurements of angle-resolved light scattering distributions from clear dielectric, isotropic coatings. The calculated distributions are derived from topography measurements performed with scanning white light

Algorithms for Calculating Single-Atom Step Heights

January 1, 1999
Author(s)
Joseph Fu, V W. Tsai, R Koning, Ronald G. Dixson, Theodore V. Vorburger
Recently, measuring Si(111) single atomic steps prompted us to investigate the measuring technique. The section technique is the most popular method for measuring the height. By measuring a simulated Si(111) atomic step, we have found it could have an

NIST Microform Calibration - How Does It Benefit U.S. Industry?

October 1, 1998
Author(s)
Jun-Feng Song, Theodore V. Vorburger
In microform metrology, complex 3-D surface features in the micrometer range must be quantified for their space and size including dimensions, curves, angles, profile deviations, and alignment errors, as well as surface roughness with measurement
Was this page helpful?