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A Simplified Realization for the Gaussian Filter in Surface Metrology

Published

Author(s)

Y B. Yuan, Theodore V. Vorburger, Jun-Feng Song, Thomas B. Renegar

Abstract

A simplified realization for the Gaussian filter in surface metrology is presented in this paper. The sampling function sinu/u is used for simplifying the Gaussian function. According to the central limit theorem, when n approaches infinity, the function (sinu/u)^n approaches the form of a Gaussian function. So designed, the Gaussian filter is easily realized with high accuracy, high efficiency and without phase distortion. The relationship between the Gaussian filtered mean line and the mid-point locus (or moving average) mean line is also discussed.
Proceedings Title
X. International Colloquium on Surfaces, M. Dietzsch, H. Trumpold, Editors, (Shaker Verlag GmbH, Aachen, 2000)
Conference Dates
January 31-February 2, 2000
Conference Location
Chemnitz, GE

Keywords

Gaussian filter, mean line, sampling function, surface roughness

Citation

Yuan, Y. , Vorburger, T. , Song, J. and Renegar, T. (2000), A Simplified Realization for the Gaussian Filter in Surface Metrology, X. International Colloquium on Surfaces, M. Dietzsch, H. Trumpold, Editors, (Shaker Verlag GmbH, Aachen, 2000), Chemnitz, GE (Accessed July 19, 2024)

Issues

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Created January 1, 2000, Updated February 19, 2017