Angular Distribution of Light Scattered From a Sinusoidal Grating
Egon Marx, Thomas A. Germer, Theodore V. Vorburger, B C. Park
The angular distributions of light scattered by gold-coated and aluminum-coated gratings having amplitudes of ~90 nm and periods of 6.67 ¿m were measured and calculated for light incident from a HeNe laser at an angle of 6E. Experimental results are compared with predictions of Beckmann's scalar theory and Rayleigh's vector theory. The measured scattering pattern has a background of scattered light due mainly to residual surface roughness. Also the power in the higher-order peaks is larger by several orders of magnitude than the computed one, which can be attributed mainly to the low-order contributions of the harmonics in the profile.