Dimensional Metrology of Millimeter- and Sub-millimeter-scale Components

Published

October 1, 2000

Author(s)

Theodore V. Vorburger, Jun-Feng Song, Joseph Fu, M Tundermann, Thomas Brian Renegar, Theodore D. Doiron, N G. Orji

Abstract

Decreasing sizes and tolerances of engineering components bring a demand for decreasing uncertainty in the dimensional measurements of these parts. Hence there is increasing need for measuring machines capable of performing dimensional and geometrical measurements at high resolution and high accuracy. We aim to develop the technique of interferometric microscopy into a tool for dimensional and geometrical measurements of component features ranging in size from a few millimeters to 5 ¿m with uncertainties as small as 1 ¿m or less. We will also integrate recently developed probe technology into a coordinate measuring machine (CMM) to produce measurements of holes with diameters as small as 0.7 mm approximately. Preliminary measurements with the interferometric microscope of the diameters and spacings of optical fibers in an optical connector show measurement reproducibility less than 1 ¿m.

Proceedings Title

Proceedings of SPIE, SPIE Meeting - ICALEO 2000 Conference on Laser Microfabrication

Volume

90

Conference Dates

October 3-4, 2000

Conference Location

Orlando, FL, USA

Conference Title

SPIE Meeting

Pub Type

Conferences

Keywords

dimensional measurement, interferometry, metrology, microscopy, Mirau, optical, scanning, standard, white light

Citation

Vorburger, T. , Song, J. , Fu, J. , Tundermann, M. , Renegar, T. , Doiron, T. and Orji, N. (2000), Dimensional Metrology of Millimeter- and Sub-millimeter-scale Components, Proceedings of SPIE, SPIE Meeting - ICALEO 2000 Conference on Laser Microfabrication, Orlando, FL, USA (Accessed October 28, 2025)