TY  - CONF
AU  - Theodore Vorburger
AU  - Jun-Feng Song
AU  - Joseph Fu
AU  - M Tundermann
AU  - Thomas Renegar
AU  - Theodore Doiron
AU  - N Orji
C2  - Proceedings of SPIE, SPIE Meeting - ICALEO 2000 Conference on Laser Microfabrication, Orlando, FL, USA
DA  - 2000-10-01 00:10:00
LA  - en
M1  - 90
PB  - Proceedings of SPIE, SPIE Meeting - ICALEO 2000 Conference on Laser Microfabrication, Orlando, FL, USA
PY  - 2000
TI  - Dimensional Metrology of Millimeter- and Sub-millimeter-scale Components
ER  -