@conference{841566,
  author = {Theodore Vorburger and Jun-Feng Song and Joseph Fu and M Tundermann and Thomas Renegar and Theodore Doiron and N Orji},
  title = {Dimensional Metrology of Millimeter- and Sub-millimeter-scale Components},
  year = {2000},
  number = {90},
  month = {2000-10-01 00:10:00},
  publisher = {Proceedings of SPIE, SPIE Meeting - ICALEO 2000 Conference on Laser Microfabrication, Orlando, FL, USA},
  language = {en},
}