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Displaying 33276 - 33300 of 73970

Final Report: Report of the CCQM Pilot P26.1: Determination of Sulfur in Diesel Fuel

January 1, 2007
Author(s)
William R. Kelly, Robert D. Vocke Jr., Jacqueline L. Mann, Gregory C. Turk
The European Union and the United States have set new lower limits on sulfur in diesel transport fuel of 10 g/g and 15 g/g, respectively. Implementation of these regulations will require the production of high accuracy standards at these and lower levels

Fundamental Limits of Optical Critical Dimension Metrology: A Simulation Study

January 1, 2007
Author(s)
Richard M. Silver, Thomas A. Germer, Ravikiran Attota, Bryan M. Barnes, B Bunday, J Allgair, Egon Marx, Jay S. Jun
This paper is a comprehensive summary and analysis of a SEMATECH funded project to study the limits of optical critical dimension scatterometry. The project was focused on two primary elements: 1) the comparison, stability, and validity of industry models

Helium Ion Microscopy: A New Technique for Semiconductor Metrology and Nanotechnology

January 1, 2007
Author(s)
Michael T. Postek, Andras Vladar, John A. Kramar, L A. Stern, John Notte, Sean McVey
The Helium Ion Microscope (HIM) offers a new, potentially disruptive technique for nano-metrology. This methodology presents an approach to measurements for nanotechnology and nano-manufacturing which has several potential advantages over the traditional
Displaying 33276 - 33300 of 73970
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