July 17, 2012
Author(s)
Houxun H. Miao, Kartik A. Srinivasan, Vladimir A. Aksyuk
… (MEMS) have been applied to many measurement problems in physics, chemistry, biology and medicine. In parallel, cavity optomechanical systems have achieved … the standard quantum limit is combined with MEMS actuation in a fully integrated, compact, low power, stable system …