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The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)



Janet M. Cassard, Jon C. Geist, Craig D. McGray, Richard A. Allen, Muhammad Y. Afridi, Brian J. Nablo, Michael Gaitan, David G. Seiler


This paper presents an overview of the Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM), which is a single test chip with test structures from which material and dimensional properties are obtained using five documentary standard test methods (from which its name is derived). Companies can validate their use of the documentary standard test methods by comparing their in-house measurements taken on the RM with the National Institute of Standards and Technology (NIST) measurements taken on the same test structures. In addition, the MEMS 5-in-1 can be used to: • Characterize or validate a process, • Take local measurements of customer-designed structures, • Compare measurements meaningfully between laboratories on similarly (or differently) processed test structures (e.g., to facilitate communications between suppliers and customers), • Trouble-shoot a process, and • Calibrate an instrument. Reference values are given for an RM 8096 chip used at NIST for stability studies. It takes a considerable amount of time to develop an RM and we would be willing to help you develop your own. Alternatively, they are available for purchase from the NIST SRM Program Office.
Proceedings Title
A conference poster paper for publication on-line
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD
Conference Title
2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics


MEMS 5-in-1, MEMS Calculator, Reference Material, RM 8096, RM 8097, test chip


Cassard, J. , Geist, J. , McGray, C. , Allen, R. , Afridi, M. , Nablo, B. , Gaitan, M. and Seiler, D. (2013), The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097), A conference poster paper for publication on-line, Gaithersburg, MD, [online], (Accessed July 20, 2024)


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Created March 27, 2013, Updated February 19, 2017