@conference{27196,
  author = {Janet Cassard and Jon Geist and Craig McGray and Richard Allen and Muhammad Afridi and Brian Nablo and Michael Gaitan and David Seiler},
  title = {The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)},
  year = {2013},
  month = {2013-03-27},
  publisher = {A conference poster paper for publication on-line, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912229},
  language = {en},
}