TY  - CONF
AU  - Janet Cassard
AU  - Jon Geist
AU  - Craig McGray
AU  - Richard Allen
AU  - Muhammad Afridi
AU  - Brian Nablo
AU  - Michael Gaitan
AU  - David Seiler
C2  - A conference poster paper for publication on-line, Gaithersburg, MD
DA  - 2013-03-27
LA  - en
PB  - A conference poster paper for publication on-line, Gaithersburg, MD
PY  - 2013
TI  - The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912229
ER  -