May 1, 2006
Author(s)
Michael W. Cresswell, William Gutherie, R. Dixon, Richard A. Allen, Christine E. Murabito, Joaquin (. Martinez
… of the Semiconductor Electronics Division, the Information Technology Laboratory, and the Precision Engineering Laboratory at NIST, in collaboration with VLSI Standards, Inc., of San Jose, … CD-metrology instruments that are used in semiconductor manufacturing. The reference material is configured as a 9-mm …