September 1, 2002
Author(s)
Eyal Gerecht, V. A. Bhupathiraju, Erich N. Grossman, Jeffrey W. Nicholson, Fernando Rodriguez-Morales, Dazhen Gu, Sigfrid Yngvesson
… a thin NbN film at the National Institute of Standards and Technology in Boulder, CO. A two-fold approach can be taken. The first … sputtering chamber. By current biasing the RF plasma in a mixture of Ar and N2, while using a Nb target, we can … bolometers, mixers, superconducting devices, terahertz technology …