Kreider, K.
, Chen, D.
, Kimes, W.
, DeWitt, D.
and Tsai, B.
(2003),
Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools, 2003 Int''l Conf. Characterization and Metrology for ULSI Technology , Austin, TX, USA
(Accessed April 26, 2024)
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Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools
Published
Author(s)
K G. Kreider, D H. Chen, W A. Kimes, ,
Proceedings Title
2003 Int''l Conf. Characterization and Metrology for ULSI Technology
Conference Dates
March 24-28, 2003
Conference Location
Austin, TX, USA
Conference Title
Proc. 2003 Int'l Conf. Characterization and Metrology for ULSI Technology
Pub Type
Conferences
Citation
Created December 31, 2002, Updated October 12, 2021