Kreider, K.
, Chen, D.
, Kimes, W.
, DeWitt, D.
and Tsai, B.
(2003),
Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools, 2003 Int''l Conf. Characterization and Metrology for ULSI Technology , Austin, TX, USA
(Accessed December 4, 2024)