TY  - CONF
AU  - K Kreider
AU  - D Chen
AU  - W Kimes
AU  - D DeWitt
AU  - Benjamin Tsai
C2  - 2003 Int''l Conf. Characterization and Metrology for ULSI Technology , Austin, TX, USA
DA  - 2003-01-01 00:01:00
LA  - en
PB  - 2003 Int''l Conf. Characterization and Metrology for ULSI Technology , Austin, TX, USA
PY  - 2003
TI  - Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools
ER  -