September 1, 2007
Author(s)
Michael T. Postek, Kevin W. Lyons
… of the necessary instrumentation, metrology, and standards. Integration of the instruments, their … nanomanufacturing. Advanced instrumentation, metrology and standards will allow the physical dimensions, properties, … introduces the Instrumentation, Metrology, and Standards for Nanomanufacturing Conference at the 2007 SPIE …