Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Search Publications

NIST Authors in Bold

Displaying 1401 - 1425 of 2289

Design and Performance of Capping Layers for EUV Multilayer Mirrors

June 1, 2003
Author(s)
Sasa Bajt, H N. Chapman, Nhan Nguyen, J Alameda, J C. Robinson, M Malinowski, E Gullikson, Andrew Aquila, Charles Tarrio, Steven Grantham
The reflectance stability of multilayer coatings for extreme ultraviolet lithography (EUVL) in a commercial tool environment is of utmost importance to ensure continuous exposures with minimum maintenance cost. We have made substantial progress in

Microhotplate Gas Sensor Arrays

November 18, 1999
Author(s)
Richard E. Cavicchi, Stephen Semancik, R M. Walton, B Panchapakesan, Don L. DeVoe, M I. Aquino-Class, J D. Allen, John S. Suehle
… CO, gas sensor, methanol, microhotplate, SnO 2 , tin oxide
Displaying 1401 - 1425 of 2289
Was this page helpful?