January 1, 1999
Author(s)
R M. Walton, Richard E. Cavicchi, Stephen Semancik, B Panchapakesan, Don L. DeVoe, M I. Aquino-Class, J D. Allen, John S. Suehle
… to better meet the needs of a particular application. Tin oxide was used as the base sensing material for microhotplates used in these studies. Tin oxide is grown selectively on each individual element within … monitoring, gas microsensor, micromachined silicon, tin oxide, volatile organics …