April 1, 2014
Author(s)
Noel Smith, John Notte, Adam V. Steele
… Owing to the development of new ion source technology, users of focused ion beams (FIBs) have an increasingly wide array of uniquely … capable platforms to choose from. Specifically, the new ion sources are able to offer superior performance in several … ion sources, focused ion beams, inductively coupled plasma, …