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PUBLICATIONS

Performance of a C60+ Ion Source on a Dynamic SIMS Instrument

Published

Author(s)

Albert J. Fahey, John G. Gillen, P Chi, Christine M. Mahoney

Abstract

An IonOptika [1] C60+ ion source has been fitted onto a CAMECA [1] ims-4f. Stable ion beams of C60+ and C602+ have been obtained with typical currents approaching 20 nA under conditions that allow for several days of source operation. The beam has been able to be focussed into a spot size of ~1 ?m and scanning ion images acquired. We have performed analyses to characterize the performance of C60+ and C602+. Depth profiles of a Cr-Ni multi-layer and polymer films with C60+ have produced excellent results. We have discovered that under bombardment energies of
Citation
Applied Surface Science
Pub Type
Journals

Keywords

Buckministerfullerene, cluster ion beams, ion source, SIMS ion source

Citation

Fahey, A. , Gillen, J. , Chi, P. and Mahoney, C. (2006), Performance of a C<sub>60</sub>+ Ion Source on a Dynamic SIMS Instrument, Applied Surface Science (Accessed April 25, 2024)

Created July 1, 2006, Updated February 17, 2017