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Displaying 1 - 25 of 349

Multi-technique reference measurement of critical dimension and shape for model validation in scanning electron microscopy

April 22, 2025
Author(s)
Wataru Yamane, Daron Westly, Glenn Holland, Yu Yamazawa, Naoto Ito, Andras Vladar, John Villarrubia
In semiconductor device manufacturing, 3D structure measurements of newly complex devices would be valuable alongside conventional scanning electron microscopy (SEM) and critical dimension SEM (CD-SEM) measurements. Since these applications in SEM directly

Statistical study and parallelization of multiplexed single-electron sources

September 9, 2024
Author(s)
S Norimoto, P See, N Schoinas, I Rungger, Tommy Boykin, Michael Stewart, J. P. Griffiths, C. Chen, D. A. Ritchie, M. Kataoka
Increasing electric current from a single-electron source is a main challenge in an effort to establish the standard of the ampere defined by the fixed value of the elementary charge e and operation frequency f . While the current scales with f , due to an

Measurement-driven neural-network training for integrated magnetic tunnel junction arrays

May 14, 2024
Author(s)
William Borders, Advait Madhavan, Matthew Daniels, Vasileia Georgiou, Martin Lueker-Boden, Tiffany Santos, Patrick Braganca, Mark Stiles, Jabez J. McClelland, Brian Hoskins
The increasing scale of neural networks needed to support more complex applications has led to an increasing requirement for area- and energy-efficient hardware. One route to meeting the budget for these applications is to circumvent the von Neumann

Model Validation for Scanning Electron Microscopy

April 27, 2023
Author(s)
Olga Ridzel, Wataru Yamane, Ishiaka Mansaray, John S. Villarrubia
We are beginning projects to validate the physics models used for interpretation of electron microscopy images. In one, we will measure electron yields and energy spectra from cleaned well-characterized samples subjected to electron bombardment inside of a

Measurements and model of UV-induced oxidation of aluminum

March 22, 2023
Author(s)
Robert F. Berg, Charles S. Tarrio, Thomas B. Lucatorto
We present measurements and a model of aluminum oxidation induced by ultraviolet (UV) radiation. Spots of oxide were grown by focusing synchrotron radiation onto a polycrystalline aluminum membrane in the presence of water vapor at pressures from 3×10-8

Stroboscopic Ultrafast Imaging Capabilities Using RF Strip-lines in a Commercial Transmission Electron Microscope

May 1, 2022
Author(s)
Spencer Reisbick, Myung-Geun Han, Chuhang Liu, yubin zhao, Eric Montgomery, Vikrant Gokhale, Jason J. Gorman, Chunguang Jing, June W. Lau, Yimei Zhu
The development of ultrafast electron microscopy (UEM), specifically stroboscopic imaging, has brought the study of structural dynamics to a new level by overcoming the spatial limitations of ultrafast spectroscopy and the temporal restrictions of

Trapped electrons and ions as particle detectors

August 5, 2021
Author(s)
Jacob Taylor, Daniel Carney, Hartmut Haffner, David Moore
Electrons and ions trapped with electromagnetic fields have long served as important high- precision metrological instruments, and more recently have also been proposed as a platform for quantum information processing. Here we point out that these systems

A new model dielectric function for loss functions and electron damping

March 10, 2021
Author(s)
Eric L. Shirley
Trends in the zeroth frequency moment of the imaginary part of the dielectric function are studied for a wide range of metals, semiconductors and insulators. These results are combined with estimates for the inverse-first moment (related by Kramers-Kronig
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