Virtual rough samples to test 3D nanometer-scale SEM stereo photogrammetry

Published

March 22, 2016

Author(s)

John S. Villarrubia, Vipin N. Tondare, Andras Vladar

Abstract

The combination of SEM for high spatial resolution, images from multiple angles to provide 3D information, and commercially available stereo photogrammetry software for 3D reconstruction offers promise for dimensional metrology in 3D. A method is described to test 3D photogrammetry software by the use of virtual samples--mathematical samples from which simulated images are made for use as inputs to the software under test. The virtual sample is constructed by wrapping a rough skin with any desired power spectral density around a smooth near-trapezoidal line with rounded top corners. Reconstruction is performed with images simulated from different angular viewpoints. The software's reconstructed 3D model is then compared to the known geometry of the virtual sample. Three commercial photogrammetry software packages were tested. Two of them produced results for line height and width that were within close to 1 nm of the correct values. All of the packages exhibited some difficulty in reconstructing details of the surface roughness.

Proceedings Title

Proc. SPIE 9778

Volume

9778

Conference Dates

February 21-25, 2016

Conference Location

San Jose, CA

Conference Title

Metrology, Inspection, and Process Control for Microlithography XXX

Pub Type

Conferences

Download Paper

https://doi.org/10.1117/12.2219777

Keywords

critical dimension (CD), dimensional metrology, model-based metrology, scanning electron microscopy (SEM), simulation, stereo photogrammetry, surface roughness, virtual sample

Citation

Villarrubia, J. , Tondare, V. and Vladar, A. (2016), Virtual rough samples to test 3D nanometer-scale SEM stereo photogrammetry, Proc. SPIE 9778, San Jose, CA, [online], https://doi.org/10.1117/12.2219777 (Accessed April 17, 2024)