TY - CONF AU - John Villarrubia AU - Vipin Tondare AU - Andras Vladar C2 - Proc. SPIE 9778, San Jose, CA DA - 2016-03-22 DO - https://doi.org/10.1117/12.2219777 LA - en M1 - 9778 PB - Proc. SPIE 9778, San Jose, CA PY - 2016 TI - Virtual rough samples to test 3D nanometer-scale SEM stereo photogrammetry ER -