@conference{208461,
  author = {John Villarrubia and Vipin Tondare and Andras Vladar},
  title = {Virtual rough samples to test 3D nanometer-scale SEM stereo photogrammetry},
  year = {2016},
  number = {9778},
  month = {2016-03-22},
  publisher = {Proc. SPIE 9778, San Jose, CA},
  doi = {https://doi.org/10.1117/12.2219777},
  language = {en},
}