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NIST Special Database #28

Author(s)
Reference Data Set V. National software reference library
The goal of this document is to help W3C editors write better specifications, by making a specification easier to interpret without ambiguity and clearer as to...

Candidate Protocols for the HIMSS Registry Profile

Author(s)
William J. Majurski, J Barkely
The goal of this document is to help W3C editors write better specifications, by making a specification easier to interpret without ambiguity and clearer as to...

Acoustic Emission Sensors and Their Calibration

Author(s)
Donald G. Eitzen, Franklin R. Breckenridge
Noting Item: Request for NOTING- originally published in the Nondestructive Testing Handbook, Second Edition: Vol.5 Acoustic Emission Testing. Columbus, OH...

Measuring Form and Radius of Spheres With Interferometry

Author(s)
Quandou (. Wang, Johannes A. Soons, Ulf Griesmann
The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius of curvature at one point and...

Ultra-thin SiO2 on Si, Part V: Results of a CCQM Pilot Study of Thickness Measurements

Author(s)
M P. Seah, S J. Spencer, F Bensebaa, I Vickridge, H Danzebrink, Michael Krumrey, T Gross, W Oesterle, E Wendler, B Rheinlander, Yasushi Azuma, I Kojima, N Suzuki, M Suzuki, Shigeo Tanuma, D W. Moon, Hansuek Lee, H Cho, H Y. Chen, A T. Wee, T Osipowicz, J S. Pan, W A. Jordaan, R Hauert, U Klotz, C van der marel, M Verheijen, Y Tamminga, C Jeynes, P Bailey, S Biswas, U Falke, Nhan Van Nguyen, Deane Chandler-Horowitz, James R. Ehrstein, D Muller, Joseph Dura

MEMS-based Embedded Sensor Virtual Components for SoC

Author(s)
Muhammad Afridi, Allen R. Hefner Jr., David W. Berning, Colleen E. Hood, Ankush Varma, Bruce Jacob, Stephen Semancik
Advancement in MEMS-based sensors brings a new challenge for system-on-a-chip (SoC) design integration where analog and digital circuits coexist on a common...

Exploring and Extending the Limits of CD-SEMs' Resolution

Author(s)
Andras Vladar, Michael T. Postek, John S. Villarrubia
This study of SEM resolution is occasioned by concerns that it is no longer adequate for lithography process control in integrated circuit manufacturing. For...
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