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MEMS-based Embedded Sensor Virtual Components for SoC

Published

Author(s)

Muhammad Afridi, Allen R. Hefner Jr., David W. Berning, Colleen E. Hood, Ankush Varma, Bruce Jacob, Stephen Semancik

Abstract

Advancement in MEMS-based sensors brings a new challenge for system-on-a-chip (SoC) design integration where analog and digital circuits coexist on a common substrate with the actual sensing platform. Integration of these MEMS-based sensors into an SoC requires a sensor core or virtual component (VC) that is compatible with the digital design strategy for a larger system design. At present, there are no sensor VCs in CAD libraries for SoC integration. The purpose of this paper is to introduce a gas sensor VC that is compatible with SoC design methodology.
Citation
2003 International Semiconductor Device Research Symposium

Keywords

MEMS, sensors, SoC

Citation

Afridi, M. , Hefner Jr., A. , Berning, D. , Hood, C. , Varma, A. , Jacob, B. and Semancik, S. (2003), MEMS-based Embedded Sensor Virtual Components for SoC, 2003 International Semiconductor Device Research Symposium, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31571 (Accessed June 14, 2024)

Issues

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Created November 24, 2003, Updated October 12, 2021