@misc{759166,
  author = {Muhammad Afridi and Allen Hefner Jr. and David Berning and Colleen Hood and Ankush Varma and Bruce Jacob and Stephen Semancik},
  title = {MEMS-based Embedded Sensor Virtual Components for SoC},
  year = {2003},
  month = {2003-11-25 00:11:00},
  publisher = {2003 International Semiconductor Device Research Symposium},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31571},
  language = {en},
}