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An equation for an unknown surface field that represents scattering by a rough patch on a flat dielectric surface is presented. The geometrical considerations...
The National Institute of Standards and Technology is developing a simple one-dimension certified pitch standard (or scale) covering the range 1 um to 10 mm...
Researchers at the National Institute of Standards and Technology are developing a virtual manufacturing cell, which will facilitate standards development and...
This paper summarizes - the work that is currently being done within ISO 10303 (a.k.a. STEP -- ISO/TC184/SC4) -- the needs for data access and sharing in a...
Jack A. Stone Jr., Alois Stejskal, Lowell P. Howard
A dither in path length can dramatically improve the accuracy of wavelength-shift methods used for absolute distance interferometry. Here we report how a dither...
Jack A. Stone Jr., Lowell P. Howard, Alois Stejskal, M Stephens, C Oates, L Hollberg
Diode lasers have several unique capabilities for length-measurement applications, arising from properties of the diodes that are much different from those of...
V W. Tsai, Theodore V. Vorburger, P Sullivan, Ronald G. Dixson, Richard M. Silver, Edwin R. Williams, J Schneir
The decreasing feature dimensions required in the semiconductor manufacturing industry are placing ever increasing demands upon metrology instruments. Atomic...
Various transducer companies offer proprietary smart transducers and interfaces as upgrades or improvements. Such upgrades ease installation, perform self-test...
We have developed a transducer which allows the benefits of Line Focus Beam (LFB) acoustic microscopy to be realized over large areas, using a conventional...