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An uncertainty procedure is used for reporting the NIST surface finish and microform calibration uncertainties. The combined standard uncertainty is a...
Richard M. Silver, Amy Singer, L Carroll, S Berg-cross, James E. Potzick
Many of the significant challenges in making accurate overlay registration measurements are discussed. An understanding of the causes of the errors affecting...
David J. Wineland, James C. Bergquist, D J. Berkeland, John J. Bollinger, F C. Cruz, Wayne M. Itano, Branislav M. Jelenkovic, B E. King, D M. Meekhof, J D. Miller, C Monroe, Joseph N. Tan
An equation for an unknown surface field that represents scattering by a rough patch on a flat dielectric surface is presented. The geometrical considerations...
The National Institute of Standards and Technology is developing a simple one-dimension certified pitch standard (or scale) covering the range 1 um to 10 mm...