Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Uncertainty Procedure for NIST Surface Finish and Microform Calibration



Jun-Feng Song, Theodore V. Vorburger


An uncertainty procedure is used for reporting the NIST surface finish and microform calibration uncertainties. The combined standard uncertainty is a combination of the uncertainty from the geometric non-uniformity of the measured surface, and the uncertainty from the measuring system, which includes the uncertainties from the calibration and check standards, instruments, environment, measuring setup, and from the long-term variations. Theoretical and experimental methods for testing instrument repeatability and noise, stylus tip size, filter and non-linearity are described. The relationships between the combined standard uncertainty and the calibration traceability, control limit of check standards, and reproducibility are also discussed.
Proceedings Title
Proceedings of Measurement Science Conference
Conference Dates
January 1, 1996
Conference Location
Anaheim, CA


calibration, microform, surface finish, surface metrology, traceability, uncertainty


Song, J. and Vorburger, T. (1996), Uncertainty Procedure for NIST Surface Finish and Microform Calibration, Proceedings of Measurement Science Conference, Anaheim, CA (Accessed July 14, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created January 1, 1996, Updated February 19, 2017