Song, J.
and Vorburger, T.
(1996),
Uncertainty Procedure for NIST Surface Finish and Microform Calibration, Proceedings of Measurement Science Conference, Anaheim, CA
(Accessed October 12, 2025)
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Uncertainty Procedure for NIST Surface Finish and Microform Calibration
Published
Author(s)
,
Abstract
An uncertainty procedure is used for reporting the NIST surface finish and microform calibration uncertainties. The combined standard uncertainty is a combination of the uncertainty from the geometric non-uniformity of the measured surface, and the uncertainty from the measuring system, which includes the uncertainties from the calibration and check standards, instruments, environment, measuring setup, and from the long-term variations. Theoretical and experimental methods for testing instrument repeatability and noise, stylus tip size, filter and non-linearity are described. The relationships between the combined standard uncertainty and the calibration traceability, control limit of check standards, and reproducibility are also discussed.Proceedings Title
Proceedings of Measurement Science Conference
Conference Dates
January 1, 1996
Conference Location
Anaheim, CA
Pub Type
Conferences
Keywords
calibration, microform, surface finish, surface metrology, traceability, uncertainty
Citation
Issues
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Created January 1, 1996, Updated February 19, 2017