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Conferences

Measurement Uncertainity and Noise in Nanometrology

June 1, 1999

Author(s)

James E. Potzick

The measurement of feature sizes on integrated circuit photomasks and wafers is an economically important and technically challenging application of...

Toward Nanometer Accuracy Measurements

June 1, 1999

Author(s)

John A. Kramar, E Amatucci, David E. Gilsinn, Jay S. Jun, William B. Penzes, Fredric Scire, E C. Teague, John S. Villarrubia

We at NIST are building a metrology instrument called the Molecular Measuring Machine (MMM) with the goal of performing 2D point-to-point measurements with one...

Focus and Edge Detection Algorithms and Their Relevance to the Development of an Optical Overlay Calibration Standard

June 1, 1999

Author(s)

S Fox, Mario Dagenais, Edward A. Kornegay, Richard M. Silver

We present results of investigations into optical focus and edge detection algorithms relevant to overlay metrology. We compare gradient energy, standard...

Two-Dimensional Calibration Artifact and Measurement Methodology

June 1, 1999

Author(s)

Richard M. Silver, Theodore D. Doiron, William B. Penzes, S Fox, Edward A. Kornegay, S Rathjen, M Takac, D Owen

In this paper, we describe our design and the manufacturing of a two-dimensional grid artifact of chrome on quartz on a 6 inch by 6 inch by .250 glass blank...

Dimensional Metrology with the NIST Calibrated Atomic Force Microscope

June 1, 1999

Author(s)

Ronald G. Dixson, R Koning, V W. Tsai, Joseph Fu, Theodore V. Vorburger

Atomic force microscopes (AFMs) are increasingly used in the semiconductor industry as tools for submicrometer dimensional metrology. The scales of an AFM must...

Comparison of Methods for Adapter Characterization

June 1, 1999

Author(s)

James P. Randa, Wojciech Wiatr, Robert L. Billinger

Operating Margins for a Superconducting Voltage Waveform Synthesizer

June 1, 1999

Author(s)

Samuel Benz, Clark A. Hamilton, Charles J. Burroughs

Operating margins for biolar superconducting voltage waveform synthesizer were measured. Current ranges were determined for 101 equally spaced dc voltage steps...

Coplanar Transmission Lines with Meandering Center Conductors in Y-Ba-Cu-O/Au Bilayers

June 1, 1999

Author(s)

C Weber, Ronald H. Ono, James Booth, Leila R. Vale, Samuel Benz, A. M. Klushin, H. Kohlstedt, R. Semerad

We have investigated both conventional and meandering coplanar microwave transmission lines patterned in Y-Ba-Cu-O/Au bilayers on yttria-stablized zirconia and...

Software to Optimize the Testing of Mixed-Signal Devices

June 1, 1999

Author(s)

Gerard N. Stenbakken, Andrew D. Koffman, T. M. Souders

New software is now available to help test and measurement engineers optimize the testing of complex electronic devices. Examples of products that are...

The Fallacy of Monitoring Surge Voltages: SPDs and PCs Galore

June 1, 1999

Author(s)

A. Mansoor, K. O. Phipps, Francois D. Martzloff

To support the recommendation of shifting transient monitoring from voltage surges to current surges, the paper presents experimental results as well as...

Predicting Nonlinear Effects in Superconducting Microwave Transmission Lines from Mutual Inductance Measurements

June 1, 1999

Author(s)

James Booth, Leila R. Vale, Ronald H. Ono, John H. Claassen

We demonstrate the use of a new experimental technique based on mutual inductance measurements to quantitatively predict nonlinear effects in microwave...

Large Area YBa₂Cu₃O_7-x Bolometers on Si Substrates

June 1, 1999

Author(s)

Leila R. Vale, Ronald H. Ono, Donald G. McDonald, Robert J. Phelan

We have developed YBa 2Cu 3O 7-x (YBCO) thermometers for large-area (4 mm x 4 mm) electrical substitution bolometers. We passivated the YBCO with a thin Au...

Third Harmonics Generation from Y-Ba-Cu-O Bicrystal Josephson Junctions in Coplanar Waveguides

June 1, 1999

Author(s)

Hisashi Shimakage, James Booth, Leila R. Vale, Ronald H. Ono

Distributed Nonlinear Effects in Planar Transmission Lines

June 1, 1999

Author(s)

James Booth, James A. Beall, Leila R. Vale, Ronald H. Ono

Optimum Characteristics of High Temperature Josephson Junctions for "Lumped" Array Applications

June 1, 1999

Author(s)

Ronald H. Ono, Samuel Benz

We present design criteria for arrays of Josephson junctions optimized for use in the Josephson digital-analog converter and for a THz oscillator. We will...

Supporting Manufacturing Process Analysis and Trouble Shooting with ACTS

June 1, 1999

Author(s)

Michelle P. Steves, Wo L. Chang, Amy Knutilla

This paper presents a prototype tool called ACTS (Annotation Collaboration Tool via SMIL), which was designed to meet the user requirements of a distributed...

Assessment Error Sources in Rockwell Hardness Measurements

June 1, 1999

Author(s)

Walter S. Liggett Jr, Samuel Low, David J. Pitchure, Jun-Feng Song

In the use of hardness test blocks, the uncertainty due to block non-uniformity can be reduced if one is willing to make measurements at specified locations on...

Optical Linewidth Models: Then and Now

June 1, 1999

Author(s)

Robert D. Larrabee, Richard M. Silver, M P. Davidson

In the late 1970's, Dr. Diana Nyyssonen demonstrated that NIST could optically calibrate photomask linewidth standards that were narrower than the classical...

Telepresence: A New Paradigm for Industrial and Scientific Collaboration

June 1, 1999

Author(s)

Michael T. Postek, Marylyn H. Bennett, N J. Zaluzec

The successful development of a collaboratory for Telepresence Microscopy (TPM) provides an important new tool to promote technology transfer in the areas of...

Modeling and Experimental Aspects of Apparent Beam Width as an Edge Resolution Measure

June 1, 1999

Author(s)

C Archie, J R. Lowney, Michael T. Postek

The SEMATECH advanced metrology advisory group (AMAG) recently issued a critical dimension (CD) scanning electron microscope (SEM) specification. One component...

Carrier Concentration Dependence of Scanning Capacitance Microscopy Signal in the Vicinity of P-N Junctions

June 1, 1999

Author(s)

Joseph Kopanski, Jay F. Marchiando, Brian G. Rennex

Scanning capacitance microscopy was used to image 1) boron dopant gradients in p-type silicon, and 2) identical boron dopant gradients in n-type silicon. The...

Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

June 1, 1999

Author(s)

Jay F. Marchiando, Joseph Kopanski, John Albers

Analysis of Current Flow in Mono-Crystalline Electrical Linewidth Structures

June 1, 1999

Author(s)

S Smith, I. A. Lindsay, Anthony Walton, Michael W. Cresswell, Loren W. Linholm, Richard A. Allen, M. Fallon, Alan Gundlach

The current flow in lightly doped mono-crystalline silicon structures designed for use as low cost secondary reference linewidth standards is investigated. It...

High Accuracy High Speed Gaussian Filter in Surface Metrology

May 31, 1999

Author(s)

Y B. Yuan, Jun-Feng Song, Theodore V. Vorburger

Both (1+x^2)^(-n) and (sin x/x)^n functions are very close to the Gaussian distribution for large value of n. Based on these functions, two new algorithms are...

Update on a Consumer-Oriented Guide for Surge Protection

May 27, 1999

Author(s)

Francois D. Martzloff, T. S. Key, D. Nastasi, K. O. Phipps, J. May

Caught among contradictory stories on the need for surge protection as well as unsupported anecdotes of surge-related failures found in some editorial...

Cyanate Ester Clay Nanocomposites: Synthesis and Flammability Studies

May 23, 1999

Author(s)

Jeffrey W. Gilman, Richard H. Harris Jr., Douglas Hunter

New goals outlined by the U. S. Federal Aviation Administration (FAA) Advanced Fire-Safe Aircraft Materials Research Program enumerate an order-of-magnitude...

Bursting Bubbles From Combustion of Thermoplastic Materials in Microgravity.

May 18, 1999

Author(s)

Kathryn M. Butler

Many thermoplastic materials in common use for a wide range of applications, including spacecraft, develop bubbles internally as they bum due to chemical...

Bursting Bubbles From Combustion of Thermoplastic Materials in Microgravity

May 18, 1999

Author(s)

Kathryn M. Butler

Many thermoplastic materials in common use for a wide range of applications, including spacecraft, develop bubbles internally as they bum due to chemical...

A Framework for Throughput and Stability Analysis of a DS-CDMA Network

May 17, 1999

Author(s)

Vladimir V. Marbukh, Nader Moayeri

We propose a framework for throughput and stability analysis of a Direct Sequence Code Division Multiple Access (DS-CDMA) network. Given chip rate, processing...

Critical Infrastructures Protection: Research Agendas for Information Systems Security

May 17, 1999

Author(s)

Stuart W. Katzke, A Oldehoeft, Shirley M. Radack

Several national studies have examined the vulnerabilities and threats to the critical infrastructures upon which the United States depends for its national...

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